External users: registration to be carried out only through I-STEM portal
Additional information about sample and analysis details should be filled in the pdf form provided in the I-STEM portal under “DOWNLOAD CSRF”
Internal users (IITB): registration to be carried out only through DRONA portal
Additional information about sample and analysis details should be filled in the pdf form provided here.
.
Category
- Fabrication and Processing » Nanofabrication
Booking Details
Facility Management Team and Location
Facility Features, Working Principle and Specifications
Facility Description
The Plasma Asher tool used in semiconductor micro and nanofabrication for surface cleaning, material removal, and photoresist stripping through plasma ashing, a dry process that removes the organic materials from substrates.
NA
NA
Sample Preparation, User Instructions and Precautionary Measures
NA
Na
Charges for Analytical Services in Different Categories
All charges are in INR
Internal- 2500
External Academia - 3700
Start - up - 4625
R&D - 5550
Industry - 8400
Applications
Descum
Sample Details
NA
Si, SiO2, Diamond, GaN
O2
2 inch Si wafer
NA
Na and K samples not allowed
NA