Make
Bruker/ Dektak XT
Model
Bruker/ Dektak XT
Facility Status
Working
Date of Installation
Facility Management Division
Centre for Sophisticated Instruments and Facilities (CSIF)-IoE Funded
.
Category
- Fabrication and Processing » Microfabrication
Booking Details
Slot Booking Link
Booking available for
Internal and External Both
Facility Management Team and Location
Facility In Charge
Prof. Saurabh Lodha
Facility Manager
Dr. Deepti Rukade
Facility Operator
Ms. Shilpa
Facility Management Members
Prof. Saurabh Lodha, Prof. Udayan G, Prof. Swaroop Ganguly
Department
Electrical Engineering
Lab Email ID
query.iitbnf@gmail.com
Facility Location
Nanoelectronics Processing Lab (NanoE bldg, 1st floor)
Lab Phone No
022 2159 3552
Facility Features, Working Principle and Specifications
Facility Description
Facility Description
The DektakXT stylus surface profiler is an advanced thin and thick film step height measurement tool. This tool can profile surface topography as well as measure surface roughness
Features Working Principle
Equipment compatible with 2”, 4”, 6” and 8’’ wafers
Stylus, LIS 3, 2um Radius- Type B
Scan length: upto 30 mm
Vertical resolution : less than or equal to 1 A˚ for 2 um vertical step
Step height repeatability: 6A˚ or lower for a 1 um step
Stylus size: 2 um and 12.5 um
Capable of measuring samples: up to 50 mm thick
Field of view: 1 mm to 4 mm Profile auto-leveling and stitching software
Stylus force : 1mg-15mg
Body Specification
NA
Instructions for Registration, Sample Preparation, User Instructions and Precautionary Measures
Instructions for Registration
NA
Instruction for Sample Preparation
NA
User Instructions and Precautionary Measures
NA
Charges for Analytical Services in Different Categories
Usage Charges
To be decided
Applications
Step thickness measurement, stress measurement
Sample Details
Chemical allowed
NA
Allowed Substrate
Si, Ge, Glass, Sapphire
Substrate Dimension
NA
Target dimension
NA
Contamination remarks
No sticky and soft sample allowed.
Precursors/ Targets allowed
NA