External users: registration to be carried out only through I-STEM portal
Additional information about sample and analysis details should be filled in the pdf form provided in the I-STEM portal under “DOWNLOAD CSRF”
Internal users (IITB): registration to be carried out only through DRONA portal
Additional information about sample and analysis details should be filled in the pdf form provided here.
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Category
- Fabrication and Processing » Microfabrication
Booking Details
Facility Management Team and Location
Facility Features, Working Principle and Specifications
Facility Description
The DektakXT stylus surface profiler is an advanced thin and thick film step height measurement tool. This tool can profile surface topography as well as measure surface roughness
Equipment compatible with 2”, 4”, 6” and 8’’ wafers
Stylus, LIS 3, 2um Radius- Type B
Scan length: upto 30 mm
Vertical resolution : less than or equal to 1 A˚ for 2 um vertical step
Step height repeatability: 6A˚ or lower for a 1 um step
Stylus size: 2 um and 12.5 um
Capable of measuring samples: up to 50 mm thick
Field of view: 1 mm to 4 mm Profile auto-leveling and stitching software
Stylus force : 1mg-15mg
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Sample Preparation, User Instructions and Precautionary Measures
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Charges for Analytical Services in Different Categories
All charges are in INR
Internal- 1600
External Academia - 2400
Start - up - 3000
R&D - 3600
Industry - 5800
Applications
Step thickness measurement, stress measurement
Sample Details
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Si, Ge, Glass, Sapphire
preferred 1.5 cm x 1. 5 cm
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No sticky and soft sample allowed.
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