External users: registration to be carried out only through I-STEM portal
Additional information about sample and analysis details should be filled in the pdf form provided in the I-STEM portal under “DOWNLOAD CSRF”
Internal users (IITB): registration to be carried out only through DRONA portal
Additional information about sample and analysis details should be filled in the pdf form provided here.
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Category
- Fabrication and Processing » Nanofabrication
Booking Details
Facility Management Team and Location
Facility Features, Working Principle and Specifications
Facility Description
The multi-material atomic layer deposition tool provides precision in depositing multi-material thin films with atomic-level control with high uniformity, conformality, and thickness control
Sample Preparation, User Instructions and Precautionary Measures
NA
Na
Charges for Analytical Services in Different Categories
All charges are in INR
| IITB Students TA | IITB students | IITB Monash students | External Academia | National Labs | SINE Start up | Research Park Startup | Research Park Industry | Industry |
| 2500 | 2500 | 2500 +18%GST | 5000 +18%GST | 12500 +18%GST | 12500 +18%GST | 12500 +18%GST | 18750 +18%GST | 25000 + 18% GST |
Applications
Thin films, gate oxides
Sample Details
Si, SiO2, Quartz
NA
1cm X 1cm upto 4 inch
NA
Samples having Na and K not allowed
NA