External users: registration to be carried out only through I-STEM portal
Additional information about sample and analysis details should be filled in the pdf form provided in the I-STEM portal under “DOWNLOAD CSRF”
Internal users (IITB): registration to be carried out only through DRONA portal
Additional information about sample and analysis details should be filled in the pdf form provided here.
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Category
- Fabrication and Processing » Nanofabrication
Booking Details
Facility Management Team and Location
Facility Features, Working Principle and Specifications
Facility Description
The multi-material atomic layer deposition tool provides precision in depositing multi-material thin films with atomic-level control with high uniformity, conformality, and thickness control
Sample Preparation, User Instructions and Precautionary Measures
NA
Na
Charges for Analytical Services in Different Categories
All charges are in INR
Internal- 2500
External Academia - 3700
Start - up - 10000
R&D - 12000
Industry - 17000
Applications
Thin films, gate oxides
Sample Details
Si, SiO2, Quartz
NA
1cm X 1cm upto 4 inch
NA
Samples having Na and K not allowed
NA