Make
Durham Magneto Optics LTD
Model
ML3
Facility Status
Working
Date of Installation
Facility Management Division
Centre for Sophisticated Instruments and Facilities (CSIF)-IoE Funded
.
Category
- Fabrication and Processing » Microfabrication
- Fabrication and Processing » Microfabrication
Booking Details
Slot Booking Link
Booking available for
Internal and External Both
Facility Management Team and Location
Facility In Charge
Prof. Veeresh Deshpande
Facility Manager
Dr. Deepti Rukade
Facility Operator
Mr. Subhrat, Ms. Manshi
Facility Management Members
Prof. Kasturi Saha, Prof. Veeresh Deshpande, Prof. Dipankar Saha
Department
Electrical Engineering
Lab Email ID
query.iitbnf@gmail.com
Facility Location
Micro 1 Yellow Room, IITBNF, EE Annex
Lab Phone No
022 2159 3552
Facility Features, Working Principle and Specifications
Facility Description
Facility Description
The Microwriter ML 3 is a direct-write photolithography tool which can be used for direct writing on the substrate or mask writing.
Features Working Principle
The feature sizes (line/space) range from 2 μm (minimum) to 50 μm (maximum) for mask writing, and from 1 μm (minimum) to 50 μm (maximum) for direct writing.
Instructions for Registration, Sample Preparation, User Instructions and Precautionary Measures
Charges for Analytical Services in Different Categories
Usage Charges
Under discussion
Applications
Lithography
Sample Details
Chemical allowed
Resists
Allowed Substrate
Si, GaN, Diamond, Quartz
Gases allowed
NA
Substrate Dimension
2 inch
Target dimension
NA
Contamination remarks
NA
Precursors/ Targets allowed
NA