External users: registration to be carried out only through I-STEM portal
Additional information about sample and analysis details should be filled in the pdf form provided in the I-STEM portal under “DOWNLOAD CSRF”
Internal users (IITB): registration to be carried out only through DRONA portal
Additional information about sample and analysis details should be filled in the pdf form provided here.
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Category
- Fabrication and Processing » Microfabrication
- Fabrication and Processing » Microfabrication
Booking Details
Facility Management Team and Location
Facility Features, Working Principle and Specifications
Facility Description
The Microwriter ML 3 is a direct-write photolithography tool which can be used for direct writing on the substrate or mask writing.
The feature sizes (line/space) range from 2 μm (minimum) to 50 μm (maximum) for mask writing, and from 1 μm (minimum) to 50 μm (maximum) for direct writing.
Sample Preparation, User Instructions and Precautionary Measures
Charges for Analytical Services in Different Categories
Under discussion
Applications
Lithography
Sample Details
Resists
Si, GaN, Diamond, Quartz
NA
2 inch
NA
NA
NA