External users: registration to be carried out only through I-STEM portal
Additional information about sample and analysis details should be filled in the pdf form provided in the I-STEM portal under “DOWNLOAD CSRF”
Internal users (IITB): registration to be carried out only through DRONA portal
Additional information about sample and analysis details should be filled in the pdf form provided here.
.
Category
- Fabrication and Processing » Nanofabrication
- Fabrication and Processing » Nanofabrication
Booking Details
Facility Management Team and Location
Facility Features, Working Principle and Specifications
Facility Description
The VOYAGER system by Raith is an advanced electron beam lithography (EBL) tool designed for high-resolution patterning and precise nanofabrication. It is typically used in semiconductor device fabrication requiring nanoscale patterning.
The system is capable of patterning features down to the sub-nm scale with high precision using focused electron beam to directly write patterns on a resist-coated substrate with acceleration voltages (typically between 1 and 50 kV).
NA
Sample Preparation, User Instructions and Precautionary Measures
NA
NA
Charges for Analytical Services in Different Categories
Under discussion
Applications
Lithography
Sample Details
NA
Si, GaN, Diamond,
NA
1 cm x 1 cm
NA
Biological samples not allowed
NA