Make
Raith GmbH
Model
VOYAGER, Model no. 18011
Facility Status
Working
Date of Installation
Facility Management Division
Centre for Sophisticated Instruments and Facilities (CSIF)-IoE Funded
.
Category
- Fabrication and Processing » Nanofabrication
- Fabrication and Processing » Nanofabrication
Booking Details
Slot Booking Link
Booking available for
Internal
Facility Management Team and Location
Facility In Charge
Prof. Ashwin Tulapurkar
Facility Manager
Dr. Deepti Rukade
Facility Operator
Ms. Anjum, Mr. Kanchan
Facility Management Members
Prof. Ashwin Tulapurkar, Prof. Saurabh Lodha, Prof. Dipankar Saha
Department
Electrical Engineering
Lab Email ID
query.iitbnf@gmail.com
Facility Location
Nano 2 lab,Ground Floor,IITBNF,EE Annex
Lab Phone No
022 2159 3552
Facility Features, Working Principle and Specifications
Facility Description
Facility Description
The VOYAGER system by Raith is an advanced electron beam lithography (EBL) tool designed for high-resolution patterning and precise nanofabrication. It is typically used in semiconductor device fabrication requiring nanoscale patterning.
Features Working Principle
The system is capable of patterning features down to the sub-nm scale with high precision using focused electron beam to directly write patterns on a resist-coated substrate with acceleration voltages (typically between 1 and 50 kV).
Body Specification
NA
Instructions for Registration, Sample Preparation, User Instructions and Precautionary Measures
Instructions for Registration
NA
Instruction for Sample Preparation
NA
User Instructions and Precautionary Measures
NA
Charges for Analytical Services in Different Categories
Usage Charges
Under discussion
Applications
Lithography
Sample Details
Chemical allowed
NA
Allowed Substrate
Si, GaN, Diamond,
Gases allowed
NA
Substrate Dimension
1 cm x 1 cm
Target dimension
NA
Contamination remarks
Biological samples not allowed
Precursors/ Targets allowed
NA