DRIE SiC

External users: registration to be carried out only through I-STEM portal
Additional information about sample and analysis details should be filled in the pdf form provided in the I-STEM portal under “DOWNLOAD CSRF”

Internal users (IITB): registration to be carried out only through DRONA portal
Additional information about sample and analysis details should be filled in the pdf form provided here.

Make
Oxford
Model
PlasmaPro®100 Cobra
Facility Status
Not Working

.

Category

  • Fabrication and Processing » Nanofabrication

Booking Details

Available Equipment/ Mode of use
Installation and Process acceptance ongoing

Facility Management Team and Location

Facility In Charge
Prof. Dipankar Saha
Facility Manager
Dr. Deepti Rukade
Facility Management Members
Prof. Dipankar Saha, Prof. Swaroop Ganguly, Prof. Ashwin Tulapurkar
Department
Electrical Engineering
Lab Email ID
query.iitbnf@gmail.com
Facility Location
Nano 2 Lab, Ground floor, IITBNF,EE Annex
Lab Phone No
022 2159 3552

Facility Features, Working Principle and Specifications

Facility Description

Facility Description

Installation  in process 

Features Working Principle

Installation  in process 

Body Specification

Installation  in process 

Sample Preparation, User Instructions and Precautionary Measures

Instruction for Sample Preparation

Installation  in process 

User Instructions and Precautionary Measures

Installation  in process 

Charges for Analytical Services in Different Categories

Applications

Sample Details

Chemical allowed

NA

Allowed Substrate

SiC

Gases allowed

NA

Substrate Dimension

NA

Contamination remarks

Na and K samples not allowed

Precursors/ Targets allowed

NA

SOP, Lab Policies and Other Details

Publications